Outgas Collector Models
Model
|
Application
|
Chamber Vol.
|
Chamber size
|
Chamber Qty |
Max. Temp |
BO-HM-01
|
Conventional with PAT Baking oven |
250ml
|
φ60×90mm |
1 |
200℃ |
HM-04
|
Conventional |
70ml
|
φ40×60mm |
4 |
200℃ |
160ml
|
φ60×56mm |
HM-04Y
|
High size chamber
|
250ml |
φ60×90mm
|
4 |
200℃ |
HM-04BM
|
Large size chamber
|
595ml
|
φ80×120mm
|
4 |
200℃ |
| HM-04BM PTFE |
PTFE chamber |
180m |
φ60×65mm |
4 |
200℃ |
| HM-04II |
Conventional |
180ml |
φ60×62mm |
4 |
200℃ |
| HM-06 |
Conventional |
160ml |
φ60×57mm |
6 |
200℃ |
| High size chamber type |
320ml |
φ60×114mm |
| HM-10 |
Conventional |
75ml |
φ40×60mm |
8 |
200℃ |
| Large size chamber |
471ml |
φ100×60mm |
2 |
| HM-08 |
Conventional |
300ml |
φ100×40mm |
8 |
250℃ |
| HM-08-70 |
Conventional |
209ml |
φ60×74mm |
8 |
200℃ |
| HM-24 |
Conventional |
30ml |
φ30×40mm |
24 |
200℃ |
| HM-24-80 |
Conventional |
100ml |
φ40×80mm |
24 |
200℃ |
| TDV-04 |
DVD |
451ml |
φ130×34mm |
4 |
200℃ |
| PM-0604 |
Photomask |
650ml |
W20×H180×D180mm |
4 |
200℃ |
| UVHM-4000 |
UV Curing |
20ml |
φ16×100mm |
2 |
200℃ |
| Conventional (Option) |
220ml |
W60×H20×D200mm |
| HM-1545 |
Printer Role |
9922ml |
φ159×500mm |
1 |
200℃ |
| PC-100 |
Super size |
120L |
W507×H495×D480mm |
1 |
200℃ |
| FD-4000 |
Flat Disk |
40ml |
φ100×5mm |
1 |
200℃ |
| FP-9000 |
Flat Panel Display |
157ml |
φ200×5mm |
1 |
400℃ |
| SW-8400 |
Silicon Wafer |
157ml |
φ200×5mm |
1 |
400℃ |
| SW-12400 |
Silicon Wafer |
353ml |
φ300×5mm |
1 |
400℃ |
| HD-2506 |
2.5' HDD |
122ml |
W16×H72×D106mm |
6 |
250℃ |
| HD-3504 |
3.5' HDD |
492ml |
W29.5×H109×D153mm |
4 |
250℃ |
|
